Microtome's objective has always been to offer the most protective reticle handling environment possible, so we operate a program of continuous product improvement that is driven by our own research, feedback from our customers and liaison with equipment makers. Recently we have conducted some experimental research into reticle electrostatic damage in conjunction with the University of Colorado in Colorado Springs. This research has strengthened our view that there is a widespread need for much better electrostatic protection of reticles and supports the development of our metal reticle SMIF pod for complete electric field shielding of the reticle. Since the findings from our research also have important implications for reticle protection outside the reticle pod, we now offer a reticle electrostatic protection consultancy service to help our customers improve their understanding of the problem and address it in an appropriate way (and it is important to realise that some conventional ESD protection methods and existing designs for reticle handling actually increase the risk of field induced damage!) Over the years our product range has expanded to include all the products featured here, plus a few that are not shown. The currently available product range is shown at the top of the list, but the discontinued products shown at the bottom are still supported in the field through our R&R™ service. Our "SEMI Standard" products do not simply comply with the SEMI Standards – most importantly they meet the more stringent requirements of the litho tool manufacturers themselves and have been tested and approved by them. So whatever your reticle handling requirement may be, we are confident that we can supply the best solution. If you do not see the product you think you need listed in these pages, please enquire. We will be happy to help you meet your objective. Electrostatic Protection Consultancy Service To prevent this - from educational seminars to fab-wide risk assessment of reticle handling procedures. 99100-00 SEMI Standard E111 single reticle SMIF pod with patent pending Faraday Cage construction for electric field shielding 99300-00 Canon optimised single reticle SMIF pod with patent pending Faraday Cage construction for electric field shielding 99600-00 SEMI Standard E112 multi reticle cassette New! 99600-00P Purgeable SEMI Standard E112 multi reticle cassette 99500-00 Five inch cassette with integral metal SMIF base for improved dimensional rigidity and reticle handling security 99400-00 Canon optimised six inch multi reticle cassette 21321-00 SEMI Standard E112 multi reticle pod fitted with E47.1 automation flange 21320-00 SEMI Standard E112 multi reticle pod fitted with standard manual handle           Discontinued products 99747-00 Canon optimised multi reticle cassette 87620-00 Six inch multi reticle cassette with integral SMIF base 67920-00 Six inch clip-on multi reticle cassette 51170-00 Five inch multi reticle cassette with metal SMIF base 41170-00 Five inch clip-on multi reticle cassette PRODUCTS | COMPATIBILITY | NEW DEVELOPMENTS | TESTIMONIALS | SUPPORT & REPAIR | ABOUT | CONTACT | HOME